Line spectrum confocal sensor is used to measure the thickness of the object, flatness, microstructure, tiny flaw, warp, etc., suitable for all kinds of different requirements of high precision measurement scenarios, such as high refective, lens, transparent, bending, tilt, diffuse, color, coarse, high contrast, even can measure the thickness of transparent coating and gap, they are mainly used to solve 3D contour precision measurement problems and meet the measurement and detection requirements of semiconductors, 3D glass, precision dispensing, precision parts and so on.

High-performance 3D imaging sensor provides sub-micron 3D topography data, enabling micro/nano detection scenes in electronics and semiconductor industries.

Spectral confocal technology is an optical detection method based on axial chromatic aberration and color coding technology, which dispersions the complex color light emitted by the sensor emitter into a continuous wavelength spectrum, and accurately maps the wavelength to the distance between the measured object and the sensor through color coding, They are designed with coaxial confocal optics for high measurement accuracy, wide angle adaptability, high measurement stability, strong environmental adaptability, and excellent dynamic range and signal-to-noise ratio to easily measure any type of material.

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